Thermal Annealing Furnace

Heat Treatment Furnace

A Thermal Annealing Furnace is an advanced heat treatment solution engineered to relieve internal stresses, refine microstructure, and enhance mechanical or electrical properties of materials. Widely used in industries such as semiconductors, metallurgy, glass manufacturing, and research laboratories, this furnace supports high-temperature, uniform, and repeatable thermal processing under controlled environments.

A Thermal Annealing Furnace is an advanced heat treatment solution engineered to relieve internal stresses, refine microstructure, and enhance mechanical or electrical properties of materials. Widely used in industries such as semiconductors, metallurgy, glass manufacturing, and research laboratories, this furnace supports high-temperature, uniform, and repeatable thermal processing under controlled environments.
  • Free combination on demand to meet various working conditions

Product Overview.

  • Our Thermal Annealing Furnace series offers high thermal uniformity and precise temperature control for demanding industrial and R&D processes. It is designed for batch or continuous heat treatment of metals, glass, ceramics, and semiconductor substrates. Advanced insulation and control systems ensure maximum energy efficiency and product integrity.

Tech Specs

Temperature Range Up to 1300°C (Standard range: 400°C–1100°C)
Temperature Uniformity ±3°C or better (Depending on chamber size and design)
Heating Method Electric resistance heating / Infrared (IR) / Optional gas heating
Control System Multi-zone PID temperature controllers with programmable thermal profiles
Chamber Volume From small lab-scale units (~10 liters) to large industrial capacities (>1000 liters)
Atmosphere Options Air, nitrogen, argon, vacuum, or forming gas
Cooling System Natural cooling / Forced air or gas quench (optional)
Power Supply 3-phase AC (220V / 380V / 440V), frequency 50/60Hz

Product Features.

  • High Precision Control

    Multi-zone heating elements and closed-loop feedback ensure excellent thermal accuracy.

  • Thermal Uniformity

    Optimized chamber design and insulation materials deliver consistent heat distribution.

  • Modular Design

    Easily upgradeable with options such as rapid cooling modules, gas purging, and data logging.

  • Low Contamination

    Use of clean heating elements and high-purity chamber linings suitable for semiconductor-grade processes.

  • Long Life Span

    High-quality materials and robust engineering ensure durability and consistent performance over years.

Typical Applications.

  • Semiconductor Processing

    Annealing of silicon wafers, oxide layers, and dielectric films for device fabrication.

  • Metallurgy

    Stress-relief and recrystallization of ferrous and non-ferrous metals.

  • Glass and Ceramics

    Removing internal tension in precision optical glass and ceramic components.

  • 3D Printing / Additive Manufacturing

    Post-process heat treatment of printed metal parts to improve mechanical properties.

  • Academic and R&D Labs

    Controlled thermal testing and materials development under various atmospheric conditions.

Customization Options.

  • We offer fully customizable furnace systems tailored to your specific thermal treatment needs:

  • Custom chamber sizes & heating zones

  • Optional cleanroom-compatible designs (Class 100 or higher)

  • Integrated data acquisition & SCADA systems

  • Automation features including robotic loading, recipe control, and alarms

  • Special gas inlet and vacuum ports for controlled environments

Technical Support & Services.

  • Engineering Consultation

    Our experts assist in selecting or designing the ideal furnace for your process.

  • Global Delivery & Installation

    Delivered fully assembled or in modular form for onsite assembly.

  • User Training & Operation Manuals

    Onsite or remote training to ensure safe and optimal use.

  • After-Sales Support

    24/7 technical assistance, spare parts availability, maintenance contracts.

Why Choose Us?

  • With decades of experience in thermal systems design, we provide reliable, efficient, and high-precision annealing furnace solutions that meet the highest industry standards. Whether you are scaling up production or refining your R&D capabilities, our furnaces deliver performance you can trust.

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